Scientific Research and Essays

  • Abbreviation: Sci. Res. Essays
  • Language: English
  • ISSN: 1992-2248
  • DOI: 10.5897/SRE
  • Start Year: 2006
  • Published Articles: 2753

Full Length Research Paper

Preventive maintenance model with FMEA and Monte Carlo simulation for the key equipment in semiconductor foundries

  Tsu-Ming Yeh* and Jia-Jeng Sun    
Department of Industrial Engineering and Technology Management, Dayeh University, Taiwan.
Email: [email protected]

  •  Accepted: 24 October 2011
  •  Published: 09 November 2011

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