International Journal of
Physical Sciences

  • Abbreviation: Int. J. Phys. Sci.
  • Language: English
  • ISSN: 1992-1950
  • DOI: 10.5897/IJPS
  • Start Year: 2006
  • Published Articles: 2572

Full Length Research Paper

A case study on energy saving of the facility systems for 12-inch semiconductor wafer fabs in Taiwan

Win-Jet Luo1*, Yu-Lieh Wu1, Chao-Min Lin1, Shih-Feng Cheng1 and Chun-Nan Chen2
1Department of Refrigeration, Air Conditioning and Energy Engineering, National Chin-Yi University of Technology, Taichung, Taiwan 411, R.O.C. 2Department of Physics, Tamkang University, Danshui Dist., New Taipei City 25137, Taiwan.
Email: [email protected]

  •  Accepted: 24 June 2011
  •  Published: 04 August 2011

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