November 2016

Thermal treatment in air of direct current (DC) magnetron sputtered TiN coatings

TiN coatings were deposited onto mirror polished stainless steel substrates by reactive DC magnetron sputtering using a pure Ti target and Ar+N2 atmosphere. The deposited TiN coatings were thermally treated in ambient air at temperatures ranging from 500 to 700°C for times between 1 and 16 h. The as-deposited and thermally treated coatings were characterized using glow discharge optical emission spectroscopy, x-ray...

Author(s): Fisnik Aliaj, Naim Syla, Heinrich Oettel and Teuta Dilo