International Journal of
Educational Administration and Policy Studies

  • Abbreviation: Int. J. Educ. Admin. Pol. Stud.
  • Language: English
  • ISSN: 2141-6656
  • DOI: 10.5897/IJEAPS
  • Start Year: 2009
  • Published Articles: 243

Review

Implementation of Generic Equipment Model (E30 Standard) for Semiconductor Equipment and Materials International (SEMI) automation tool

Manjiri Hoshing
MITCOE, Paud road, Pune-411038, India.
Email: [email protected]

  •  Accepted: 19 July 2013
  •  Published: 30 November 2013

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