Abstract

Amorphous titanium dioxide TiO₂ thin films have been deposited using the dc sputtering technique. The structure of the films was analyzed by X-ray diffraction and the results showed non-crystalline behavior. The optical properties of these thin films have been investigated by means of optical reflectance and transmittance spectra. The optical energy gap E_g, the Urbach tails E_u, the single oscillator energy E_o, the dispersion energy E_d and the optical constants as refractive index n, extinction coefficient k dielectric constant and optical conductivity were estimated.

Key words: Titanium dioxide, optical energy gap, refractive index, oscillator energy, dispersion energy.