Fabrication of 6 nm gap on silicon substrate for power-saving appliances
T. S. Dhahi1*, U. Hashim1, M. E. Ali2 and N. M. Ahmed3
1Institute of Nano Electronic Engineering, Universiti Malaysia Perlis, 01000 Kangar, Malaysia.
2Nanotechnology and Catalysis Research Center, Universiti Malaya, 50603 Kuala Lumpur, Malaysia.
3School of Physics, Universiti Sains Malaysia, 11800 Penang, Malaysia.
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