International Journal of
Physical Sciences

  • Abbreviation: Int. J. Phys. Sci.
  • Language: English
  • ISSN: 1992-1950
  • DOI: 10.5897/IJPS
  • Start Year: 2006
  • Published Articles: 2572

Full Length Research Paper

5 nm gap via conventional photolithography and pattern-size reduction technique

Th. S. Dhahi1*, M. E. Ali1, U. Hashim1,2, Ala’eddin A. Saif2 and T. Nazwa1
1Institute of Nano Electronic Engineering, Universiti Malaysia Perlis, 01000 Kangar, Perlis, Malaysia 2School of Microelectronic Engineering, Universiti Malaysia Perlis, 01000 Kangar, Perlis, Malaysia
Email: [email protected]

  •  Accepted: 19 April 2011
  •  Published: 04 August 2011

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