Finite element method (FEM) analysis of SAW devices is recently popular to be achieved using the basic information of stress and strain equations for linear elastic piezoelectric materials. A delay line is modeled using Gallium arsenide piezoelectric substrate and is modeled and simulated with center frequency of 1.5 GHz to be used in many electronic devices like oscillators at ultrahigh frequency range (RF-MEMES). A 5 periodic cycles of output voltage is simulated and monitored at output port of delay line while applying a sine wave to input port. Displacement of the SAW through the thickness of piezoelectric substrate is recorded and proofed that SAW does not penetrate more than the designed thickness. Displacement along wave direction is also monitored.
Key words: Finite element method surface acoustic wave (FEM SAW), delay line, radio frequency (RF)
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