Abstract

The vibrational behavior of coupled-domain micro electro mechanical systems (MEMS) devices with electrostatic actuation and squeeze film effect is investigated in this article. π-Buckingham theory is used to extract dimensionless parameters for this problem. Using these parameters, non-dimensional equation of Euler-Bernoulli beam theory and Reynolds equation of squeeze film damping are developed. Finite difference method is applied to solve these dimensionless equations simultaneously. After validation of presented non-dimensional model through comparison with literature, pull-in voltage is calculated for different conditions of microbeam. In addition, stability of the system is investigated for different non-dimensional voltage. The results will be useful in designing coupled-domain microbeams.

Key words: Microbeam, squeeze film damping, dynamic model, dimensionless groups.