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References
Chen HY, Lu FH (2005). Oxidation behaviour of titanium nitride films. J. Vac. Sci. Technol. A23(4):1006-1009. |
|
Chen L, Paulitsch J, Du Y, Mayrhofer PH (2012). Thermal stability and oxidation resistance of Ti-Al-N coatings. Surf. Coat. Technol. 206(11-12):2954-2960. |
|
Chim YC, Ding XZ, Zeng XT, Zhang S (2009). Oxidation resistance of TiN, CrN, TiAlN and CrAlN coatings deposited by lateral rotating cathode arc. Thin Solid Films 517(17):4845-4849. |
|
Cunha L, Andritschky M, Pischow K, Wang Z, Zarychta A, Miranda S, Cunha AM (2002). Performance of chromium nitride and titanium nitride coatings during plastic injection moulding, Surf. Coat. Technol. 153(2-3):160-165. |
|
Fateh N, Fontalvo GA, Gassner G, Mitterer C (2007). Influence of high-temperature oxide formation on the tribological behavior of TiN and VN coatings. Wear 262(9-10):1152-1158. |
|
Feng Ch, Li M, Xin L, Zhu Sh, Wang F (2006). Mechanical properties and oxidation behavior af a graded (Ti,Al)N coating deposited by arc-ion plating. Oxid. Met. 65(5-6):307-327. |
|
Franck M, Blanpain B, Oberländer BC, Celis JP, Roos JR (1993). Surface modification of TiN hard coatings with concentrated solar energy. Sol. Energy Mater Sol. Cells 31(3):401-414. |
|
Galindo RE, Fornies E, Albella JM (2006). Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy. Surf. Coat. Technol. 200(22-23):6185-6189. |
|
Glaser A, Surnev S, Netzer FP, Fateh N, Fontalvo GA, Mitterer C (2007). Oxidation of vanadium nitride and titanium nitride coatings. Surf. Sci. 601(4):1153-1159. |
|
Gong C, Zhang J, Yan C, Cheng X, Zhang J, Yu L, Jin Z, Zhang Z (2012). Synthesis and microwave properties of nanosized titanium nitride. J. Mater. Chem. 22(8):3370-3376. |
|
Hanaor DAH, Sorrell CC (2011). Review of the anatase to rutile phase transformation. J. Mater. Sci. 46(4):855-874. |
|
Hones P, Zakri C, Schmid PE, Lévy F, Shojaei OR (2000). Oxidation resistance of protective coatings studied by spectroscopic ellipsometry. Appl. Phys. Lett. 76(22):3194-3196. |
|
Huang JH, Yu KJ, Sit P, Yu GP (2006). Heat treatment of nanocrystalline TiN films deposited by unbalanced magnetron sputtering. Surf. Coat. Technol. 200(14-15):4291-4299. |
|
Ichimura H, Kawana A (1993). High-temperature oxidation of ion-plated TiN and TiAlN films. J. Mater. Res. 8(5):1093-1100. |
|
Knight JC (1990). The effect of annealing on the hardness, interfacial adhesion and wear behaviour of plasma-vapour-deposited TiN coatings on steel. Wear 138(1-2):239-257. |
|
Milošev I, Strehblow H-H, Navinšek B (1995). XPS study of high-temperature oxidation of CrN and TiN hard coatings. Surf. Coat. Technol. 74-75(2):897-902. |
|
Mo JL, Zhu MH (2009). Tribological oxidation behaviour of PVD hard coatings. Tribol. Int. 42(11-12):1758-1764. |
|
Nicolet MA (1978). Diffusion barriers in thin films. Thin Solid Films 52(3):415-443. |
|
Niyomsoan S, Grant W, Olson DL, Mishra B (2002). Variation of color in titanium and zirconium nitride decorative thin films. Thin Solid Films 415(1-2):187-194. |
|
Nose M, Zhou M, Honbo E, Yokota M, Saji S (2001). Colorimetric properties of ZrN and TiN coatings prepared by DC reactive sputtering. Surf. Coat. Technol. 142-144:211-217. |
|
Omrani M, Habibi M, Amrollahi R (2012). Coating of titanium nitride on stainless steel targets by a 4 kJ plasma focus device. J. Fusion Ener. 31(4):401-404. |
|
Otani Y, Hofmann S (1996). High temperature oxidation behaviour of (Ti1-xCrx)N coatings, Thin Solid Films 287(1-2):188-192. |
|
PDF-2 (1997). International Centre for Diffraction Data (ICDD). c-TiN 00-038-1420, r-TiO2 00-021-1276, a-TiO2 00-021-1272, SS 00-033-0397. |
|
Sabitzer C, Steinkellner C, Koller CM, Polick P, Rauchbauer R, Mayrhofer PH (2015). Diffusion behaviour of C, Cr and Fe in arc evaporated TiN- and CrN- based coatings and their influence on thermal stability and harndess. Surf. Coat. Technol. 275:185-192. |
|
Shin YH, Shimogaki Y (2004). Diffusion barrier property of TiN and TiN/Al/TiN films deposited with FMCVD for Cu interconnection in ULSI. Sci. Technol. Adv. Mater. 5(4):399-405. |
|
Sigurd D, Suni I, Wielunski L, Nicolet MA, Seefeld H (1981). Thermal oxidation of sputtered TiN diffusion barriers. Sol. Cells 5(1):81-86. |
|
Sundgren JE (1985). Structure and properties of TiN coatings (Review Paper). Thin Solid Films 128(1-2):21-44. |
|
Tompkins HG (1991). Oxidation of titanium nitride in room air and in dry O2. J. Appl. Phys. 70(1):3876-3880. |
|
Valkonen E, Ribbing CG, Sundgren JE (1986). Optical constants of thin TiN films: thickness and preparation effects. Appl. Optics 25(20):3624-3630. |
|
Vaz F, Machado P, Rebouta L, Cerqueira P, Goudeua Ph, Rivière JP, Alves E, Pischow K, de Rijk J (2003). Mechanical characterization of reactively magnetron-sputtered TiN films. Surf. Coat. Technol. 174:375-382. |
|
Wittmer M, Noser N, Melchior H (1981). Oxidation kinetics of TiN thin films. J. Appl. Phys. 52(11):6659-6664. |
|
Yang LC, Hsu CS, Chen GS, Fu CC, Zuo JM, Lee BQ (2005). Strengthening TiN diffusion barriers for Cu metallization by lightly doping Al. Appl. Phys. Lett. 87(12):1911-1913 |
|
Zhang Sh, Zhu W (1993). TiN coating of tools steels: a review, J. Mater. Process. Technol. 39(1-2):165-177. |
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